A linear capacitive gravimeter with pseudo-differential electrodes capable of measuring Earth tides
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| Authors: | Kanygin, M; Eshaghi, F; MontaΓ±ez MuΓ±oz, S; Schouten, D; Williams-Jones, G; Bahreyni, B |
| Year: | 2025 |
| Journal: | IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), Kaohsiung, Taiwan 912-915 PDF Article Link (DOI) |
| Title: | A linear capacitive gravimeter with pseudo-differential electrodes capable of measuring Earth tides |
| Abstract: | This paper discusses a new design for a new pseudodifferential electrode arrangement that is employed to develop a highly sensitive gravimeter. Unlike the earlier reported micromachined gravimeters, this device utilizes a set of linear springs. A dicing-free fabrication process with a high-yield is developed that allows for the retention of a portion of the handle wafer letting the device have a large proofmass in a relatively small chip area of 1 ππ2. The gravimeter has undergone extensive characterization and has a sensitivity of 86ππΉ/π when measuring 1π, a resonance frequency of 445π»π§, and a noise floor of better than 350ππ/βπ»π§. The device was used to track the variations in gravitational forces over a period of two weeks and could detect the effect of earth tides after removing the temperature interferences. |
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